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Precautions for use and routine maintenance of c406 magnetron sputtering equipmentC406磁控濺射設備使用及日常保養注意事項

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Precautions for use and routine maintenance of c406 magnetron sputtering equipmentC406磁控濺射設備使用及日常保養注意事項

發布日期:2018-05-26 作者:www.tonertimes.com 點擊:

C406磁控濺射台設備使用及日常保養注意事項

一、注意事項

(一)係統

1) 實驗前勿忘通水。

2) 機械泵必須在開分子泵之前開,在分子泵關掉15分鍾後再關機械泵。

3) 在開閥V3前,檢查充氣閥V4是否關閉。

4) 閥V3開啟後,若有工作異常,應立即關閉閥V3,檢查異常原因。

5) 隻有在插板閥允許打開指示燈亮時,才允許開插板閥。若插板閥允許打開指示燈處於熄滅狀態,插板閥不允許打開,若強行打開,則插板閥易損壞。

6) 開反應室之前,必須先關上插板閥,然後才能向反應室充氣。

7) 當反應室充氣完畢後,確信反應室內已處於大氣狀態,才可開始提升操作,否則易損壞升降係統。為防不測,提升時可先點動升按鈕,開蓋後再連續提升。

8) 關閉分子泵前,先關閉插板閥。

9) 當插板閥打開阻力過大時,請勿強行打開,以免損壞。

10) 在打開反應室放樣片時,時間要盡可能短,以免反應室內長時間暴露大氣。

11) 實驗完畢後,要將反應室抽成真空,同時將管道內的殘留氣體抽淨。

12) 實驗結束後,將係統運轉15分鍾後再關閉,以便排淨泵腔內的殘留氣體。

13) 因控製櫃上有許多按壓式電鈕,注意工作中不要碰到控製櫃上的按鈕,以免發生誤操作或斷電現象。

14) 係統運轉過程中,不要長時間離走,以免在發生特殊情況時,不能及時處理。

磁控濺射台

(二)分子泵

1) 嚴禁抽大氣。

2) 在分子泵工作過程中不允許關機械泵。

(三)機械泵

1) 不能長時間抽大氣。

2) 機械泵必須在開分子泵之前開,在分子泵關掉15 分鍾後再關機械泵。

3) 在泵初次運轉或在電網檢修後,請注意泵的旋轉方向。泵若發生反轉,會導致機械泵的油反回到分子泵內,分子泵受到汙染,嚴重時,分子泵需回原廠拆裝清洗。

4) 排氣管要通暢。

(四)真空計

1) 向反應室內充氣或通反應氣體,要先關掉真空計測量開關。

2) 對第一次使用的電阻規管,應進行“零點”和“滿度”的校準。

3) 真空計電阻設定1 在出廠前已設定好(上限為3Pa),請勿更改設定 值,以免閥V3 及插板閥允許打開指示燈控製出錯。導致真空係統損壞。

(五)射頻電源

1) 射頻電源在第一次開啟時,需預熱5 分鍾。

2) 加載時,不要忘了開冷卻水。

(六)流量計

1) 操作時Z好是打開電源後,將閥控開關撥至“關閉”位,設定值調到“0”,再開氣,預熱到“0”點穩定後,再將閥控開關撥至“閥控”位,調流量至所需值。

2) 在操作閥控開關進行“清洗”後,不得直接轉至“閥控”位工作,應先撥至“關閉”位,再轉至“閥控”位。

3) 注意流量塊的工作壓差應控製在005MPa 至02MPa 之間。

二、日常維護保養

(一)真空係統

1) 長時間不工作,需經常抽真空,以保持有一個好的真空。

2) 一天工作完畢,需將管道內的殘餘氣體抽淨。

3) 清洗反應室

工作一天或工作一段時間後(依具體工作量而定),需清洗反應室。

(二)分子泵

1) 更換潤滑油

分子泵運轉時應保證潤滑油液麵處於規定位臵,以保證軸承的良好潤滑。加油液麵高度應至油標(紅色標示帶)上限。

建議在工作了3000小時或一年內更換一次潤滑油。更換潤滑油時,油池要清洗幹淨,加油時要保證清潔、無雜質灰塵。潤滑油要使用專用的分子泵潤滑油。

2) 分子泵清洗

建議在工作了6000小時或兩年後回原廠拆裝清洗。若不清洗並不影響分子泵工作,但泵力下降,將影響係統極限真空及抽速。

(三)機械泵

1) 檢查

經常注意檢查下列項目:

a. 真空泵的油量是否在兩條油位指示線之間。

b. 真空泵油是否變色。

c. 有無異常噪聲。

d. 是否有漏油現象。

e. 排氣管內是否有存油,請定期清理,以保證排氣通暢。

2) 換油周期

定期檢查油位管內的油或通過放油口放出少量的油,觀察泵油的變色、汙染程度。如果出現嚴重汙染,請及時更換泵油。建議12個月內更換一次真空泵油。

3) 換油

a打開放油閥,放出泵內的油,油排完後,關閉放油閥,空轉5秒後,再停機,打開放油閥,放出從泵體內排出的油,關閉放油閥。

b油汙染嚴重時,加入適當量的新油,運轉數分鍾,對泵體內部進行清洗,可根據油的汙染情況,重複進行這樣的操作。

c從加油口加入新的油,加到油麵在兩條油位線之間。

d請使用指定用油,ULVAC R7。

4) 拆洗

當泵內汙染嚴重,影響極限真空,泵力嚴重下降,漏油等,需回原廠拆裝清洗。

Precautions for use and daily maintenance of c406 magnetron sputtering table I. 

precautions (I) system 

1) do not forget to water before the experiment. 

2) The mechanical pump must be started before the molecular pump is started, and the mechanical pump shall be turned off 15 minutes after the molecular pump is turned off.

3) Before opening valve V3, check whether charging valve V4 is closed. 

4) After valve V3 is opened, if there is any abnormal operation, close valve V3 immediately and check the cause of the abnormal operation. 

5) It is only allowed to open the gate valve when the indicator light of the gate valve is on. If the plug-in valve is allowed to open and the indicator light is off, the plug-in valve is not allowed to open. If it is forced to open, the plug-in valve is easy to be damaged.

6) Before opening the reaction chamber, the plug-in valve must be closed before filling the reaction chamber. 

7) When the reaction chamber is inflated, the lifting operation can be started only when it is sure that the reaction chamber is in the atmospheric state, otherwise the lifting system will be easily damaged. In order to prevent accidents, the lifting button can be inched first, and then the lifting can be continued after the cover is opened. 

8) Close the gate valve before closing the molecular pump.

9) When the opening resistance of the gate valve is too large, do not open it forcibly to avoid damage. 

10) When opening the setting out sheet of the reaction chamber, the time should be as short as possible to prevent the reaction chamber from exposing the atmosphere for a long time. 

11) After the experiment, the reaction chamber should be vacuumized and the residual gas in the pipeline should be removed. 

12) At the end of the experiment, the system was operated for 15 minutes and then shut down in order to exhaust the residual gas in the pump cavity. 

13) Because there are many push buttons on the control cabinet, pay attention not to touch the buttons on the control cabinet in order to avoid misoperation or power failure. 

14) During the operation of the system, do not leave for a long time, so as not to handle in time in case of special circumstances.

(2) Molecular pump 

1) do not pump air. 

2) It is not allowed to turn off the mechanical pump during the operation of the molecular pump. 

(3) Mechanical pump 

 1) cannot pump air for a long time. 

 2) The mechanical pump must be started before the molecular pump is started, and the mechanical pump shall be turned off 15 minutes after the molecular pump is turned off.

 3) Please pay attention to the rotation direction of the pump after the initial operation of the pump or maintenance of the power grid. If the pump reverses, the oil of the mechanical pump will return to the molecular pump, which will be polluted. In serious cases, the molecular pump needs to be disassembled and cleaned in the original factory.

 4) The exhaust pipe shall be unobstructed. 

(4) Vacuum gauge 

1) when filling or passing reaction gas into the reaction chamber, turn off the vacuum gauge measuring switch first. 

2) For the resistance gauge used for the first time, the "zero point" and "full degree" shall be calibrated. 

3) The resistance setting 1 of vacuum gauge has been set before delivery (the upper limit is 3PA). Please do not change the setting value, so as to avoid the error of valve V3 and plug-in valve allowing to open the indicator light control. Damage to the vacuum system. 

(5) RF power supply 

1) when the RF power supply is turned on for the first time, it needs to be preheated for 5 minutes. 

2) Do not forget to turn on the cooling water when loading. 

(6) Flowmeter 

1) the best way to operate is to turn on the power, turn the valve control switch to the "off" position, set the value to "0", then turn on the gas, preheat to the "0" point and stabilize, then turn the valve control switch to the "valve control" position, and adjust the flow to the required value. 

2) After operating the valve control switch for "cleaning", it is not allowed to directly turn to the "valve control" position for work. First turn to the "close" position, and then turn to the "valve control" position. 

3) Note that the working pressure difference of flow block shall be controlled between 005mpa and 02mpa. 

2、 Routine maintenance (I) vacuum system

1) does not work for a long time, need to vacuumize regularly to maintain a good vacuum. 

2) After one day's work, the residual gas in the pipeline shall be pumped out. 

3) After cleaning the reaction chamber for a day or a period of time (depending on the specific workload), the reaction chamber needs to be cleaned. 

(2) Molecular pump 

1) when replacing the lubricating oil molecular pump, ensure that the lubricating oil level is at the specified position to ensure the good lubrication of the bearing. The oil level shall be up to the upper limit of the oil mark (red marking tape). It is recommended to change the lubricating oil once within 3000 hours or one year. When changing the lubricating oil, the oil pool shall be cleaned, and the oil shall be clean and free of impurities and dust. Special molecular pump lubricating oil shall be used for lubricating oil. 

2) It is recommended to return to the original factory for disassembly and cleaning after working for 6000 hours or two years. If it is not cleaned, it will not affect the operation of the molecular pump, but if the pump force drops, it will affect the limit vacuum and pumping speed of the system. 

(3) Mechanical pump 

1) check the following items frequently: A. check whether the oil volume of vacuum pump is between two oil level indication lines. b. Whether the vacuum pump oil changes color. c. Whether there is abnormal noise. d. Whether there is oil leakage. e. If there is any oil in the exhaust pipe, please clean it regularly to ensure smooth exhaust. 

2) Regularly check the oil in the oil level pipe or discharge a small amount of oil through the oil drain during the oil change cycle, and observe the discoloration and pollution degree of the pump oil. In case of serious pollution, please replace the pump oil in time. It is recommended to change the vacuum pump oil within 12 months. 

3) Oil change a: open the oil drain valve and drain the oil in the pump. After the oil is drained, close the oil drain valve. After idling for 5 seconds, shut down the pump, open the oil drain valve, drain the oil discharged from the pump and close the oil drain valve. B. when the oil pollution is serious, add the appropriate amount of new oil, operate for several minutes, clean the pump body, and repeat the operation according to the oil pollution. C add new oil from the oil filler, and add the oil level between the two oil level lines. D please use the specified oil, ULVAC R7. 

4) When the pump is disassembled and cleaned, it needs to be disassembled and cleaned back to the original factory because of the serious pollution in the pump, the impact on the limit vacuum, the serious drop of pump force, oil leakage, etc.

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