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蝕刻機噴頭的作用及維護Function and maintenance of etcher nozzle

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蝕刻機噴頭的作用及維護Function and maintenance of etcher nozzle

發布日期:2018-09-01 作者:www.tonertimes.com 點擊:

   1.蝕刻機噴頭的介紹:

蝕刻機噴頭是蝕刻機噴淋裝置中Z重要的一個部件,藥液噴淋的形狀是根據蝕刻機噴頭的種類來決定的,不同的蝕刻機噴頭所起到的作用是不一樣的。

  2.蝕刻機噴頭的作用:

等離子刻蝕機主要作用是把蝕刻液均勻的噴淋到工件上,蝕刻機噴頭根據蝕刻機每道工序所對應的要求所選擇不同的種類。比如:常規情況下蝕刻段選擇用扇形,因為蝕刻段對壓力的要求比較高,而91xjcc下载ioses扇形噴嘴噴淋出的液體壓力會相對較高;顯影段和退膜段91xjcc下载ioses就采用錐形噴嘴,因為這兩處需要覆蓋麵廣,而錐形噴嘴剛好就有這種特性。

扇形噴嘴:扇形噴嘴噴霧     錐形噴嘴:錐形噴嘴噴霧

  3.蝕刻機噴頭的維護:

蝕刻液是通過蝕刻機噴頭頂端的小孔把藥水給噴淋出來,這個小孔的直徑是很小的,所以是很容易堵塞的,而91xjcc下载ioses的蝕刻液沉澱物和腐蝕下來的殘渣都是顆粒狀的,使用的時間過長了這些固體顆粒物的形成就會堵塞噴頭,所以91xjcc下载ioses需要定期的清理蝕刻機的噴頭才能達到良好的腐蝕效果。

1. Introduction of etching machine nozzle: the etching machine nozzle is the most important part of the etching machine spray device. The shape of liquid medicine spray is determined by the type of etching machine nozzle. Different etching machine nozzles play different roles. 2. Function of etching machine nozzle: the main function of plasma etching machine is to spray etching liquid evenly on the workpiece, and different types of etching machine nozzle are selected according to the corresponding requirements of each process of etching machine. For example: in general, the sector is selected for etching section, because the pressure requirements of etching section are relatively high, and the liquid pressure sprayed by our sector nozzle will be relatively high; in developing section and film withdrawing section, we use the conical nozzle, because these two parts need wide coverage, and the conical nozzle just has this characteristic. Fan nozzle: fan nozzle spray cone nozzle: conical nozzle spray 3. Maintenance of the etching machine nozzle: the etching liquid sprays the liquid medicine through the small hole on the top of the etching machine nozzle. The diameter of the small hole is very small, so it is easy to block. Our etching liquid sediment and corrosion residue are granular, and the formation of these solid particles will block the nozzle if the use time is too long, so we need to regularly Cleaning the nozzle of the etching machine can achieve good corrosion effect.

等離子刻蝕機

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