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快速退火爐維修注意事項:Precautions for maintenance of rapid annealing furnace:

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快速退火爐維修注意事項:Precautions for maintenance of rapid annealing furnace:

發布日期:2019-04-27 作者:www.tonertimes.com 點擊:

概述:

快速退火爐是以碘鎢燈管為發熱元件,升溫速度極快,采用S型熱電偶測溫並采用國際領先的模糊PID控製,具有很高的控溫精度〈±5℃〉,快速退火爐具有真空裝置,可在多種氣氛下工作。僅僅是退火爐的一個小品種。

磁控濺射台

維修注意事項:

1. 爐子首次使用或長時間不用後,要在120℃左右烘烤1小時,在300℃左右烘烤2小時後使用,以免造成爐膛開裂。爐溫盡量不要超過額定溫度,以免損壞加熱元件及爐襯。禁止向爐膛內直接灌注各種液體及溶解金屬,保持爐內的清潔。

2. 爐膛若采用石英管,當溫度高於1000℃時,石英管的高溫部分會出現不透明現象,這叫失透(又叫析晶性)是連熔石英管的一個固有缺陷,屬正常現象。

3. 冷爐使用時,由於爐膛是冷的,須大量吸熱,所以低溫段升溫速率不易過快,各溫度段的升

溫速率差別不易太大,設置升溫速率時應充分考慮所燒結材料的物理化學性質,以免出現噴料現象,汙染爐管。

4. 定期檢查溫度控製係統的電器連接部分的接觸是否良好,應特別注意加熱元件的各連接點的連接是否緊固。

5. 爐子使用過一段時間後,若真空度降低,可分別更換不鏽鋼法蘭盤之間的耐溫矽膠圈或重新安裝不鏽鋼法蘭盤或更換修理真空係統,以提高係統的整體真空度。

6. 爐子在工作過程中,一般在300℃左右若控製偏差還不能消除,出現溫度顯示值與程序給定值不符或擺動過大,檢查參數“M5、P、t”設置是否準確。

7. 此爐適用於下列工作條件:

(1)環境溫度在-10~75℃之間。

(2)周圍環境的相對濕度不超過85%。

(3)爐子周圍沒有導電塵埃,爆炸性氣體及嚴重破壞金屬和絕緣材料的腐蝕性氣體。

(4)沒有明顯的傾斜﹑振動和顛簸。

Precautions for maintenance of rapid annealing furnace

  The fast annealing furnace takes the iodine tungsten lamp as the heating element, and the heating speed is extremely fast. The S-type thermocouple is used to measure the temperature and the international leading fuzzy PID control is adopted, which has a high temperature control accuracy of <± 5 . The fast annealing furnace has a vacuum device, which can work in a variety of atmospheres. Just a small variety of annealing furnace.

Magnetron sputtering table

Maintenance precautions:

 1. After the furnace is used for the first time or not for a long time, it shall be baked for 1 hour at 120 or 2 hours at 300 to avoid furnace cracking. The furnace temperature shall not exceed the rated temperature as far as possible to avoid damage to heating elements and furnace lining. It is forbidden to directly pour various liquids and dissolved metals into the furnace to keep the furnace clean.

 2. If the furnace adopts quartz tube, when the temperature is higher than 1000 , the high-temperature part of quartz tube will appear opaque phenomenon, which is called devitrification (also called devitrification), which is an inherent defect of continuous melting quartz tube, and it is a normal phenomenon.

 3. When using the cold furnace, because the furnace is cold and needs a lot of heat absorption, the temperature rise rate in the low temperature section is not easy to be too fast, and the rise of each temperature section

  The temperature rate difference is not easy to be too large. When setting the temperature rate, the physical and chemical properties of the sintered material should be fully considered to avoid the phenomenon of spraying material and polluting the furnace tube.

 4. Regularly check whether the contact of the electrical connection part of the temperature control system is good, and pay special attention to whether the connection points of the heating elements are tight.

 5. After the furnace has been used for a period of time, if the vacuum degree decreases, the temperature resistant silicon rubber ring between the stainless steel flange plates can be replaced, or the stainless steel flange plates can be reinstalled, or the vacuum system can be replaced and repaired to improve the overall vacuum degree of the system.

 6. During the operation of the furnace, if the control deviation cannot be eliminated at about 300 , the temperature display value is inconsistent with the value given by the program or the swing is too large, check whether the parameter "M5, P, t" is set accurately.

 7. The furnace is suitable for the following working conditions:

(1) The ambient temperature is between - 10 and 75 .

(2) The relative humidity of the surrounding environment shall not exceed 85%.

(3) There is no conductive dust, explosive gas and corrosive gas that seriously damages metal and insulating materials around the furnace.

(4) There is no obvious tilt, vibration and turbulence.


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