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Magnetron sputtering (磁控濺射台))

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磁控濺射設備的主要用途Main uses of magnetron sputtering equipment

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磁控濺射設備的主要用途Main uses of magnetron sputtering equipment

發布日期:2019-06-22 作者:www.tonertimes.com 點擊:

(1)各種功能性薄膜:如具有吸收、透射、反射、折射、偏光等作用的薄膜。例如,低溫沉積氮化矽減反射膜,以提高太陽能電池的光電轉換效率。

(2)裝飾領域的應用,如各種全反射膜及半透明膜等,如手機外殼,鼠標等。

(3) 在微電子領域作為一種非熱式鍍膜技術,主要應用在化學氣相沉積(CVD)或金屬有機

(4)化學氣相沉積(MOCVD)生長困難及不適用的材料薄膜沉積,而且可以獲得大麵積非常均勻的薄膜。

(5) 在光學領域:中頻閉合場非平衡磁控濺射技術也已在光學薄膜(如增透膜)、低輻射玻璃和透明導電玻璃等方麵得到應用。特別是透明導電玻璃目前廣泛應用於平板顯示器件、太陽能電池、微波與射頻屏蔽裝置與器件、傳感器等。

(6)在機械加工行業中,表麵功能膜、超硬膜,自潤滑薄膜的表麵沉積技術自問世以來得到長足發展,能有效的提高表麵硬度、複合韌性、耐磨損性和抗高溫化學穩定性能,從而大幅度地提高塗層產品的使用壽命。

磁控濺射除上述已被大量應用的領域,還在高溫超導薄膜、鐵電體薄膜、巨磁阻薄膜、薄膜發光材料、太陽能電池、記憶合金薄膜研究方麵發揮重要作用。

磁控濺射台

(1) Various functional films: such as films with absorption, transmission, reflection, refraction, polarization and other functions. For example, silicon nitride antireflection films are deposited at low temperature to improve the photoelectric conversion efficiency of solar cells.

(2) Application in decoration field, such as all kinds of total reflection film and translucent film, such as mobiles phones shell, mouse, etc.

(3) In the field of microelectronics, as a non thermal coating technology, it is mainly used in chemical vapor deposition (CVD) or metal organic

(4) Chemical vapor deposition (MOCVD) is difficult to grow and is not suitable for thin film deposition, and large area of very uniform thin film can be obtained.

(5) In the field of optics, if closed field unbalanced magnetron sputtering technology has also been applied to optical films (such as antireflective films), low radiation glass and transparent conductive glass. Especially transparent conductive glass is widely used in flat panel display devices, solar cells, microwave and RF shielding devices and devices, sensors, etc.

(6) In the mechanical processing industry, the surface functional film and super hard film, since the surface deposition technology of lubricating film has been developed rapidly since its inception, which can effectively improve the surface hardness, composite toughness, wear resistance and high temperature chemical stability, thus greatly improving the service life of coating products.

   In addition to the above-mentioned fields, magnetron sputtering has also played an important role in the research of high temperature superconducting thin films, ferroelectric thin films, giant magnetoresistance thin films, thin film luminescent materials, solar cells, and memory alloy thin films.


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