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等離子體表麵處理的原理Principle of plasma surface treatment

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等離子體表麵處理的原理Principle of plasma surface treatment

發布日期:2020-05-26 作者: 點擊:

等離子體表麵處理的原理

TIM圖片20200526161554.png

      等離子,即物質的第四態,是由部分電子被剝奪後的原子以及原子被電離後產生的正負電子組成的離子化氣狀物質。它的能量範圍比氣態、液態、固態物質都高,存在具有一定能量分布的電子、離子和中性粒子,在與材料表麵的撞擊時會將自己的能量傳遞給材料表麵的分子和原子,產生一係列物理和化學過程。其作用在物體表麵可以實現物體的超潔淨清洗、物體表麵活化、蝕刻、精整以及等離子表麵塗覆。


   (1)對材料表麵的刻蝕作用

物理作用等離子體中的大量離子、百激収態分子、自由基等多種活性粒子,作用到固體樣品表麵,清除了表麵原有的汙度染物和雜質,而且會產生刻蝕作用,將樣品表麵變粗糙,形成許多微細坑窪,增大了樣知品的比表麵。提高固體表麵的潤濕性能。

   (2)激活鍵能,交聯作用

等離道子體中的粒子能量在 0~20eV,而聚合物中大部分的鍵能在 0~10eV,因此等離子體作用到固體表麵後,可以將固體表麵的原有的化學鍵產生斷裂,等離子體中的自由基中的這些鍵形成網狀的交聯結構,大大地激活了表麵活性。

   (3)形成新的官能團

化學作用如果放電氣體中引入反應回性氣體,那麽在活化的材料表麵會發生複雜的化學反應,引入新的官能團,如烴基、氨基、羧基等,這些官能團都是活性基團,能明顯提高答材料表麵活性。

                                                                Principle of plasma surface treatment

     Plasma, the fourth state of matter, is an ionized gaseous substance composed of the atoms deprived of some electrons and the positive and negative electrons produced after the atoms are ionized. Its energy range is higher than that of gaseous, liquid and solid materials. There are electrons, ions and neutral particles with certain energy distribution. When they collide with the material surface, they will transfer their energy to the molecules and atoms on the material surface, resulting in a series of physical and chemical processes. It can achieve super clean cleaning, surface activation, etching, finishing and plasma coating on the surface of the object.


    (1) The physical effect of etching on the surface of the material: 

         A large number of active particles such as ions, excited molecules, free radicals, etc. in the plasma act on the surface of the solid sample, remove the original contamination and impurities on the surface, and produce etching effect, roughen the surface of the sample, form many micro pits, and increase the specific surface of the sample. Improve the wettability of solid surface.

    (2) Activation of bond energy, cross-linking, etc. 

        The particle energy in the ionomer is 0-20ev, while most of the bond energy in the polymer is 0-10ev. Therefore, when the plasma acts on the solid surface, the original chemical bonds on the solid surface can be broken. These bonds in the free radicals in the plasma form a network of cross-linking structure, greatly activating the surface activity. 

   (3) The formation of new functional groups. 

        If reactive gas is introduced into the discharge gas, complex chemical reactions will occur on the surface of the activated materials. The introduction of new functional groups, such as hydrocarbon, amino, carboxyl, etc., are all active groups, which can significantly improve the surface activity of the materials. 

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相關標簽:等離子刻蝕機

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