名稱：蘇州91guochan電子科技有限公司

電話：0512-58987901

傳真：0512-58987201

郵箱：sales@tonertimes.com

地址：江蘇省張家港經濟開發區複興路2號B06棟1樓215600PRC

網址：www.tonertimes.com

Name: Suzhou cycas Microelectronics Co., Ltd.

Tel.: 0512-58987901

Fax: 0512-58987201

Email: sales@tonertimes.com

Address: 1st floor,B06 building,No.2,Fuxing Road,Zhangjiagang Economic Development Zone,Jiangsu Province 215600PRC

Website: www.tonertimes.com

Gasonics L3510

詳細介紹

Gasonics L3510

GasonicsL3510 configuration information：

1.Configured for 6"silicon wafer processing

2.Heated platen with reflector and bulb

3.UV Igniter

4.Microwave generator with pressure and temp control system

5.Automatic photoemission end-point detection

6.Three gas inputs with MFC

7.Vacuum pump

8.High throughput and excellent uniformity

所屬分類：去膠機係列Resist Asher series