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Gasonics L3510

Gasonics L3510

  • 所屬分類:去膠機係列Resist Asher series

  • 點擊次數:
  • 發布日期:2020/07/07
  • 在線詢價
詳細介紹

Gasonics L3510

GasonicsL3510 configuration information: 

1.Configured for 6"silicon wafer processing

2.Heated platen with reflector and bulb

3.UV Igniter

4.Microwave generator with pressure and temp control system

5.Automatic photoemission end-point detection 

6.Three gas inputs with MFC

7.Vacuum pump

8.High throughput and excellent uniformity


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