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CHA Mark40 Evaporator sputter

CHA Mark40 Evaporator sputter

  • 所屬分類:蒸發濺射台Evaporator sputter

  • 點擊次數:
  • 發布日期:2020/07/07
  • 在線詢價
詳細介紹

CHA Mark40 Evaporator

CHA Mark40 Evaporator Sputter configuration information:

1.CHA SR-10 power supply

2.ASC-CRYOGENICS 600 Cryo compressor

3.Pumps:

4.EBARA A10 vacuum pump

5.Cryo pump

6.Heater and heater power supply: 480V, 3 phase

7.Rotating dome

8.Currently tooled for 3"

9.2" dome with extra shields

10.6-pocket E-gun for metals (4 pockets being used – Ti, Cr, Ni, Au).


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