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Gasonics PEP3510 resist asher

Gasonics PEP3510 resist asher

  • 所屬分類:去膠機係列Resist Asher series

  • 點擊次數:
  • 發布日期:2020/07/07
  • 在線詢價
詳細介紹

GasonicsPEP3510 resist asher Main body set up for 8 'wafer configuration information:

1.S/N:M982090  and  M982100

2.Vintage: 1998

3.SECS/GEM interface

4.2x Open cassette

5.Dual Blade Yaskawa Robot

6.Left/Right coolers

7.Left Module: PEP3510A/A(L)

8.Right Module: PEP3510A/A(R)

9.Quartz process kit

10.Standard Platen

11.MKS600 series Pressure controller

12.IBM Computer

13.Microwave Power supply: Astex(2000W)

14.2x Dry pumps


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