語言
Magnetron sputtering (磁控濺射台))

產品分類

熱門關鍵詞

聯係91xjcc下载ioses

名 稱:蘇州91guochan電子科技有限公司

電 話:0512-58987901

傳 真:0512-58987201

郵 箱:sales@tonertimes.com

地 址:江蘇省張家港經濟開發區複興路2號B06棟1樓215600PRC

網 址:www.tonertimes.com

Name: Suzhou cycas  Microelectronics Co., Ltd.

Tel.: 0512-58987901

Fax: 0512-58987201

Email: sales@tonertimes.com

Address: 1st floor,B06 building,No.2,Fuxing Road,Zhangjiagang Economic Development Zone,Jiangsu Province 215600PRC

Website: www.tonertimes.com 

Axcelis 8250 medium current implanter

您的當前位置: 首 頁 >> 產品中心 >> 注入機Implanter

Axcelis 8250 medium current implanter

  • 所屬分類:注入機Implanter

  • 點擊次數:
  • 發布日期:2020/07/06
  • 在線詢價
詳細介紹


Axcelis 8250 configuration information:

  1.Vintage: 2000

 2.Wafer size: 200mm

 3.Loading configuration: SMIF

 4.Sun Ultra work station

 5.GEM/SECS interface with SECS II

 6.Auto- wafer handling with buffer cassett

 7.0-60 Deg auto tilt E-Chuck

 8.Ion source type: ELS

 9.Source material type: Moly

 10.Vaporizer: Dual

 11.Parallel beam using Hybrid Scanning

 12.On-Board Cryos

 13.Pfeiffer source pump/Beamline pump/End station pump

 14.Gas configuration: BF3/PH3/AsH3/InCl3 with Unit-1662 MFC

 15.CTI 9600 compressor

 16.Dry pumps

 


相關標簽:Implanter,axcellis8250mediumcurrentimplanterprice,axcellis8250mediumcurrentimplanterwholesale注入機,Axcelis8250mediumcurrentimplanter價格,Axcelis8250mediumcurrentimplanter批發

上一篇:沒有了
下一篇:Nissin Exceed 3000AH medium current implanter

Z近瀏覽:

相關產品:

相關新聞: