名稱：蘇州91shipin電子科技有限公司

電話：0512-58987901

傳真：0512-58987201

郵箱：sales@tonertimes.com

地址：江蘇省張家港經濟開發區複興路2號B06棟1樓215600PRC

網址：www.tonertimes.com

Name: Suzhou cycas Microelectronics Co., Ltd.

Tel.: 0512-58987901

Fax: 0512-58987201

Email: sales@tonertimes.com

Address: 1st floor,B06 building,No.2,Fuxing Road,Zhangjiagang Economic Development Zone,Jiangsu Province 215600PRC

Website: www.tonertimes.com

MRC PVD(合肥）MRC PVD (own warehouse)

詳細介紹

MRC Eclipse Star sputtering system configuration information：

1.S/N:25997

2.Vintage:2008

3.Wafer size: 4''/5''/6''

4.-. RF Chamber: Soft etch

-. Sput1: Ti(RMX-10"" Cathode)

-. Sput2: Al(SPA-10"" Cathode)

-. Sput3: Ni(RMX-10"" Cathode)"

5.DC power supply

6.9600 compressor

所屬分類：蒸發濺射台Evaporator sputter