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Magnetron sputtering (磁控濺射台))

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NovellusC1ND-103

NovellusC1ND-103

  • 所屬分類:化學氣相沉積chemical vapor deposition

  • 點擊次數:
  • 發布日期:2020/06/16
  • 在線詢價
詳細介紹

Novellus C1-150 Electric CVD System configuration information:

1. Serial number: 9318-670

2. Year: 1993

3. Wafer size: 4 "15" 16 "

4. conveyor tire

5. process cavity

6. Process: silicon nitride, silicon oxide

7. MKS, adaptorr series pressure controller

8. RF source

9. dry pump


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