名稱：蘇州91shipin電子科技有限公司

電話：0512-58987901

傳真：0512-58987201

郵箱：sales@tonertimes.com

地址：江蘇省張家港經濟開發區複興路2號B06棟1樓215600PRC

網址：www.tonertimes.com

Name: Suzhou cycas Microelectronics Co., Ltd.

Tel.: 0512-58987901

Fax: 0512-58987201

Email: sales@tonertimes.com

Address: 1st floor,B06 building,No.2,Fuxing Road,Zhangjiagang Economic Development Zone,Jiangsu Province 215600PRC

Website: www.tonertimes.com

NovellusC1ND-109

詳細介紹

Novellus C1-150 Electric CVD System configuration information:

1. Serial number: 9318-670

2. Year: 1993

3. Wafer size: 4 "15" 16 "

4. conveyor tire

5. process cavity

6. Process: silicon nitride, silicon oxide

7. MKS, adaptorr series pressure controller

8. RF source

9. dry pump

上一篇：P5000CVD
下一篇：NovellusC1ND-103

所屬分類：化學氣相沉積chemical vapor deposition