名稱：蘇州91xjcc下载ioses電子科技有限公司

電話：0512-58987901

傳真：0512-58987201

郵箱：sales@tonertimes.com

地址：江蘇省張家港經濟開發區複興路2號B06棟1樓215600PRC

網址：www.tonertimes.com

Name: Suzhou cycas Microelectronics Co., Ltd.

Tel.: 0512-58987901

Fax: 0512-58987201

Email: sales@tonertimes.com

Address: 1st floor,B06 building,No.2,Fuxing Road,Zhangjiagang Economic Development Zone,Jiangsu Province 215600PRC

Website: www.tonertimes.com

ECLIPSE1

詳細介紹

ECLIPSE1 configuration information:

1. Serial number:18625

2. Softwre Version:N/A

3. Wafer Size:125mm

4. Compressor:CTI8510

5. Controller Input voltages:208V/100A

6. Chamber: MFC

7. Power Supply:AE/Delta Master

8. RF Generator:MODEL-ACG-10B

9. DC power-AE/Delta Slave

10.Vacuum Pump

所屬分類：蒸發濺射台Evaporator sputter